|  | 13/07/2004 |
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Nikko Materials Develops Flat-typed Heater
Nikko Materials is entering into market of molybdenum silicide (MoSi2) heater. The firm developed flat-typed heater for the first time in the world by applying its technology for sputtering target materials. The firm produces the products on order at Isohara plant in Ibaraki Prefecture with expectation users seek the products with special application and severe conditions. The firm differentiates the heater from commodity grade. The firm already started sample shipments to some device makers. It targets to get first order for information technology device by the end of fiscal 2004 ending March 2005.
Molybdenum silicide heater is made by adding glass ingredients to molybdenum silicide with conductivity and heat-resistance to adjust electricity-resistance. The heater is used for industrial furnaces of glass and ceramics with the heat-resistance up to 1,800 degrees centigrade in the atmosphere.
The firm developed flat-typed heater though traditional heater has round bar shape. Flat heater has better radiation efficiency than bar type. Flat heater reduces by more than 20% of energy than bar type when wafer is heated to 500 degree C.
The new heater can be converted into cylindrical and right-angled shapes to apply any devices.
The firm also succeeded to purify heater materials by using technology for high melting point target made by tungsten silicide and molybdenum silicide. The purity has shatterproof of Impurity in heating element. The purity also extends products life to 3 times compared with traditional products because the purity makes oxide film on surface of heater.
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 | Nikko Materials Develops Flat-typed Heater
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