Mitsui's wholly owned subsidiary has supplied single crystal of
calcium fluoride for lens for TV camera for 30 years. The firm started
production of argon fluoride for lens of stepper in 1999 becoming one
of the top suppliers.

The firm succeeded mass production of the material for lens of next
generation stepper before original plan by 2005 by establishing control
technology for balance between temperature and vacuum air at single
crystal generation furnace.

The firm can also process integrated circuit with 45 to 65 nanometers
width progressing development for next generation stepper. The new
technology can be applied to single crystal for lens of argon fluoride
stepper to make large products and supply stably.

Kobe Steel